MEMS Check Valve Process Design
📍 Duration / Institution
Dec 2025, University of Pittsburgh
⭐Tags
MEMS Microfabrication
Process Flow Design
Manufacturing Feasibility
⭐ Situation + Task
This project focused on designing a manufacturable MEMS process flow for a micro-scale check valve. The goal was not to redesign the valve structure itself, but to develop a clear, feasible fabrication sequence that enables reliable release and function while minimizing process complexity, cost, and failure risks.
⚙️ Action
Designed a complete MEMS process flow, defining mask order and step-by-step sequences for deposition, lithography, etching, and sacrificial release.
Selected materials and fabrication methods (Si substrate, SiO₂ structural layers, sacrificial layers) based on etch selectivity, thermal compatibility, and process robustness.
Evaluated key manufacturing risks such as stiction, undercutting, and over-etching, and incorporated process-level mitigations to improve yield and reliability.
Optimized the process for manufacturability and scalability, reducing the total number of fabrication steps and mask usage while maintaining functional feasibility.
📈 Result
Delivered a manufacturable MEMS process design demonstrating a clear understanding of microfabrication constraints, tradeoffs, and yield considerations.
The final process flow shows how careful sequencing and material selection enable reliable MEMS device fabrication without unnecessary complexity.